Keyence Confocal Microscope

Location: Upper Level Cleanroom, Room 191

The Keyence confocal microscope is a hybrid white light and violet laser confocal microscope with nanometer scale resolution in the Z direction for step height and roughness measurements. It excels at 3D measurements of opaque films, but can also be used for transparent films in certain conditions. Its lateral resolution with the 150x objective is on the order of a few hundred nanometers.