KLA Tencor P-17 Profilometer

Location: Upper Level Cleanroom, Room 182

The P-17 profilometer measures step height, roughness, and waviness on sample surfaces. It has a maximum vertical range of 327 µm and angstrom scale resolution in the vertical direction. Lateral resolution is limited by the 2 µm stylus radius and depends on feature geometry. The tool can accommodate up to 8" wafers for height measurements and can also measure thin film stress on 4" wafers.